Structure, laminated body thereof, and manufacturing method and manufacturing device thereof

A manufacturing method of a laminated structure comprising:

• crushing agglomerated particles in which primary particles in brittle particles of a raw material are agglomerated into primary particles;
• activating a surface of the primary particles at a temperature range equal to or lower than a melting point of the primary particles under a reduced pressure atmosphere by using helium gas or argon gas as gaseous species to generate an active region;
• ejecting the primary particles arranged with a plurality of the active regions to the base material;
• and
• joining the primary particles arranged with the plurality of active regions via the active region,
• wherein a gas flow rate is set to 5 L/min or more and 10 L/min or less when the helium gas is used to eject the primary particles or 5 L/min or more and 20 L/min or less when the argon gas is used to eject the primary particles,
• the laminated structure includes a brittle particle assembly including:
• the brittle particles;
• brittle material regions having substantially the same composition ratio of metal elements as the brittle particles, the brittle material regions covering each surface of the brittle particles;
• and
• a brittle material crosslinked structure region having an amorphous structure having substantially the same composition ratio of metal elements as the brittle particles and a ratio of a metal element to a nonmetal element different from a ratio of the metal element to a nonmetal element in the brittle particles, the brittle material crosslinked structure region arranged on at least a part of the periphery of the brittle material particles, and the brittle material crosslinked structure region linking the brittle material particles arranged adjacently to each other with the brittle material regions arranged adjacently to each other,
• the brittle particles include crystallites of 1 nm or more and 300 nm or less;
• the brittle material crosslinked structure region has a shape along each surface of the brittle particles,
• the brittle material crosslinked structure region prevents the mobility of the brittle particles, and
• the structure has a compressive residual stress.

A manufacturing device of a structure comprising:

• an aerosol generator, a crusher, vacuum pump, a plasma generator and a nozzle connected to the plasma generator:
• wherein the crusher is arranged at a front stage of the plasma generator, the crusher crushes agglomerated particles sent from the aerosol generator in which primary particles in brittle particles of a raw material are agglomerated, and the crusher sends the primary particles to the plasma generator,
• a surface of the primary particles is activated at a temperature range equal to or lower than a melting point of the primary particles under a reduced pressure atmosphere by using helium gas or argon gas as gaseous species to generate an active region,
• the primary particles arranged with a plurality of the active regions are ejected to the base material by using the helium gas or the argon gas,
• a gas flow rate is set to 5 L/min or more and 10 L/min or less when the helium gas is used to eject the primary particles or 5 L/min or more and 20 L/min or less when the argon gas is used to eject the primary particles, and
• the primary particles having a plurality of the active regions are blown from the nozzle,
• wherein the structure includes a brittle particle assembly including:
• the brittle particles;
• brittle material regions having substantially the same composition ratio of metal elements as the brittle particles, the brittle material regions covering each surface of the brittle particles;
• and
• a brittle material crosslinked structure region having an amorphous structure having substantially the same composition ratio of metal elements as the brittle particles and a ratio of a metal element to a nonmetal element different from a ratio of the metal element to a nonmetal element in the brittle particles, the brittle material crosslinked structure region arranged on at least a part of the periphery of the brittle material particles, and the brittle material crosslinked structure region linking the brittle material particles arranged adjacently to each other with the brittle material regions arranged adjacently to each other,
• the brittle particles include crystallites of 1 nm or more and 300 nm or less,
• the brittle material crosslinked structure region has a shape along each surface of the brittle particles,
• the brittle material crosslinked structure region prevents the mobility of the brittle particles, and
• the structure has a compressive residual stress.