Vaporizer
AssigneeHitachi Metals, Ltd.
InventorsAkira Sasaki, Yoshinori Yoshida
Life of this patent
Estimating the term…
Abstract
A vaporizer includes a tank in which liquid material is heated to generate gas, a cabinet which houses the tank, and a conduit which supplies the gas to the outside of the cabinet. The vaporizer also includes a flow rate measuring means which measures a flow rate of the gas flowing through said conduit, and a heater plate which heats the conduit. The cabinet comprises a detachable panel that is a panel which can be removed. A first support member is fixed directly or indirectly to said cabinet at a position other than said detachable panel, the flow rate measuring means is supported by said first support member, and the heater plate is supported between said flow rate measuring means and said detachable panel by said first support member.
Claims17
A vaporizer comprising:
- a tank in which liquid material is heated to generate gas,
- a cabinet which houses said tank,
- a conduit which supplies said gas to the outside of said cabinet,
- a flow rate measuring means which measures a flow rate of said gas flowing through said conduit, and
- a heater plate which heats said conduit, the heater plate is separate from a tank heater that heats said liquid material stored in said tank, and
- a part of panels defining said cabinet is constituted by a detachable panel that is a panel which can be removed, wherein:
- a first support member is fixed directly or indirectly to said cabinet at a position other than said detachable panel,
- said flow rate measuring means is supported by said first support member, and
- said heater plate is supported between said flow rate measuring means and said detachable panel by said first support member such that said heater plate is exposed when said detachable panel is removed and said flow rate measuring means is exposed when said heater plate is removed.
Dependencies are inferred from the claim text.