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US 11,535,552 B2Granted
Chemical vapor deposition process for depositing a coating and the coating formed thereby
AssigneePilkington Group Limited
InventorsLila Raj Dahal, David Alan Strickler
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Abstract
A chemical vapor deposition process for depositing a coating comprising silicon oxide and titanium oxide is provided. A coating formed by the chemical vapor deposition process is also provided.
Claims15
A chemical vapor deposition process for depositing a coating, comprising:
- providing a glass substrate;
- forming a gaseous mixture comprising a silicon-containing compound, an oxygen-containing compound, a radical scavenger, and a titanium-containing compound;
- feeding the gaseous mixture through a coating apparatus prior to forming the coating;
- and
- discharging the gaseous mixture from the coating apparatus, directing the gaseous mixture toward and along the glass substrate, and reacting the mixture over the glass substrate to form the coating thereover, the coating having a refractive index of 1.48 or more;
- wherein the gaseous mixture comprises 0.1 to 5% of the titanium-containing compound by volume.
3 more elements
Dependencies are inferred from the claim text.