Method of manufacturing physical quantity detection sensor, and physical quantity detection sensor

A method of manufacturing a physical quantity detection sensor, comprising:

• forming a stacked structure having a plurality of sensor devices by bonding together a sensor substrate and a different type substrate of a different material from a material of the sensor substrate, the sensor substrate having a plurality of sensor movable portions positioned within a cavity defined in part by sidewalls composed of the sensor substrate and a surface of the different type substrate joining the sidewalls;
• and
• dicing the stacked structure using a dicing blade,
• wherein a groove is provided in one of the sensor substrate and the different type substrate to penetrate the one of the sensor substrate and the different type substrate, the groove having a width larger than a width of the dicing blade, and
• in at least part of the dicing, the dicing blade is accommodated in the groove and advances without contacting surfaces on left and right sides of the groove.