Post-processing techniques on mems foundry fabricated devices for large angle beamsteering
AssigneeThe United States of America as represented by the Secretary of the Air Force
InventorsLavern A Starman, John P K Walton, David Torres Reyes
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Abstract
A method of post-processing an actuator element is presented. The method begins by receiving a fabricated actuator element including a metallic layer contacting a substrate, sacrificial layer proximate the metallic layer, and a first dielectric layer on the sacrificial layer. The metallic layer has an end proximal to and contacting at least part of the substrate and a distal end extending over the first dielectric layer. A second dielectric is deposited on a portion of the metallic layer at the distal end. And, the sacrificial layer is removed.
Claims14
A method of post-processing an actuator element, the method comprising:
- receiving a fabricated actuator element including:
- a conductive layer contacting a substrate;
- sacrificial layer proximate the conductive layer;
- and
- a first dielectric layer on the sacrificial layer;
- the conductive layer having an end proximal to and contacting at least part of the substrate and a distal end extending over the first dielectric layer;
- depositing a second dielectric on a portion of the conductive layer at the distal end;
- and
- removing the sacrificial layer.
A method of post-processing an actuator element, the method comprising:
- receiving a fabricated actuator element including:
- a semiconducting layer contacting a substrate;
- sacrificial layer proximate the semiconducting layer;
- and
- a first conductive layer on the sacrificial layer;
- the semiconducting layer having an end proximal to and contacting at least part of the substrate and a distal end extending over the first conductive layer;
- depositing a dielectric on a portion of the semiconducting layer at the distal end;
- and
- removing the sacrificial layer.
Dependencies are inferred from the claim text.