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US 11,535,508 B2Granted
Pressure sensor including a microelectromechanical transducer and relating pressure-detection method
AssigneeSTMicroelectronics S.r.l.
InventorMario Giuseppe Pavone
Life of this patent
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Abstract
A pressure sensor including: a structure which delimits a main cavity of a closed type, the structure being at least partially deformable as a function of a pressure external to the structure; and a MEMS device, which is arranged in the main cavity and generates an output signal, which is of an electrical type and is indicative of the pressure inside the main cavity.
Claims21
A pressure sensor comprising:
- a structure that is at least partially deformable as a function of an external pressure applied to the structure, the structure including:
- a sealed main cavity;
- a first peripheral portion and a second peripheral portion that delimit the sealed main cavity;
- and
- an intermediate portion that is interposed between the first and the second peripheral portions, that laterally delimits the main cavity, and that has a stiffness lower than a stiffness of the first peripheral portion and lower than a stiffness of the second peripheral portion;
- a MEMS device arranged in the sealed main cavity and configured to generate an output signal of an electrical type and indicative of a pressure inside the sealed main cavity.
3 more elements
A detection system comprising:
- a pressure sensor that includes:
- a structure that is at least partially deformable as a function of an external pressure applied to the structure, the structure including:
- a sealed main cavity;
- a first peripheral portion and a second peripheral portion that delimit the sealed main cavity;
- and
- an intermediate portion that is interposed between the first and the second peripheral portions, that laterally delimits the main cavity, and that has a stiffness lower than a stiffness of the first peripheral portion and lower than a stiffness of the second peripheral portion,
- a MEMS device arranged in the sealed main cavity and configured to generate an output signal of an electrical type and indicative of a pressure inside the sealed main cavity;
- a processing unit configured to determine an estimation of the external pressure based on the output signal.
5 more elements
A device, comprising:
- a multi-layer structure including:
- a first layer having a first Young's modulus and a first surface;
- a second layer having a second Young's modulus and a second surface facing towards the first surface;
- a third layer interposed between the first surface of the first layer and the second surface of the second layer, the third layer having a third Young's modulus less than the first and second Young's moduli;
- and
- a fourth layer interposed between the second layer and the first layer;
- a sealed cavity within the multi-layer structure;
- a micro-electromechanical system (MEMS) device within the sealed cavity, the MEMS device is on the first surface of the first layer.
5 more elements
Dependencies are inferred from the claim text.