Ejection-material ejection apparatus and imprinting apparatus

A ejection-material ejection apparatus

• comprising:
• an ejection head configured to eject an ejection material;
• a storing container configured to be separated by a flexible membrane into a first storing space storing the ejection material to be supplied to the ejection head, and a second storing space storing an operating liquid;
• and
• a first pressure controller configured to control internal pressure of the second storing space,
• wherein the flexible membrane includes a first film covering the first storing space, a second film covering the second storing space, and an inter-film space situated between the first film and the second film,
• wherein the ejection-material ejection apparatus further comprises a detector configured to detect a change in a state of the inter-film space resulting from communication between at least one of the first storing space and the second storing space and the inter-film space, and
• wherein the change in the state is a change in internal pressure of the inter-film space, and
• wherein the detector detects the change in the internal pressure.

A ejection-material ejection apparatus comprising:

• an ejection head configured to eject an ejection material;
• a storing container configured to be separated by a flexible membrane into a first storing space storing the ejection material to be supplied to the ejection head, and a second storing space storing an operating liquid;
• and
• a first pressure controller configured to control internal pressure of the second storing space,
• wherein the flexible membrane includes a first film covering the first storing space, a second film covering the second storing space, and an inter-film space situated between the first film and the second film,
• wherein the ejection-material ejection apparatus further comprises a detector configured to detect a change in a state of the inter-film space resulting from communication between at least one of the first storing space and the second storing space and the inter-film space, and
• wherein the detector detects at least one of an amount and a speed of the operating liquid moving between the second storing space and the first pressure controller.

An ejection-material ejection apparatus comprising:

• an ejection head configured to eject an ejection material;
• a storing container configured to be separated by a flexible membrane into a first storing space storing the ejection material to be supplied to the ejection head, and a second storing space storing an operating liquid;
• and
• a first pressure controller configured to control internal pressure of the second storing space,
• wherein the flexible membrane includes a first film covering the first storing space, a second film covering the second storing space, and an inter-film space situated between the first film and the second film,
• wherein the ejection-material ejection apparatus further comprises a detector configured to detect a change in a state of the inter-film space resulting from communication between at least one of the first storing space and the second storing space and the inter-film space,
• wherein the change in the state is leakage of at least one of the ejection material and the operating liquid as a leaking liquid into the inter-film space,
• wherein the detector detects the leaking liquid,
• wherein the ejection-material ejection apparatus further comprising a liquid discharge port configured to discharge the leaking liquid in the inter-film space to an outside, and
• wherein the detector is a flow speed detector that detects flow speed of the leaking liquid from the liquid discharge port.