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US 11,535,034 B2Granted
Piezoelectric element and liquid ejecting head including piezoelectric layer having improved lattice ratio
AssigneeSeiko Epson Corporation
InventorsKoichi Morozumi, Hiromu Miyazawa, Hiroshi Kato, Hiroshi Ito
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Abstract
A piezoelectric element including a piezoelectric layer having a perovskite structure including lead, zirconium, and titanium, and an electrode provided on the piezoelectric layer is provided. In the piezoelectric layer, in a range of 50 nm or smaller from an interface between the piezoelectric layer and the electrode in a thickness direction, a ratio c/a of a lattice spacing a in a direction perpendicular to the thickness direction and a lattice spacing c in the thickness direction satisfies 0.986≤c/a≤1.014.
Claims12
A piezoelectric element comprising:
- a piezoelectric layer having a perovskite structure including lead, zirconium, and titanium in a molar ratio, respectively, of 120:52:48;
- and
- an electrode provided on the piezoelectric layer,
- wherein, in the piezoelectric layer, in a range of 50 nm or smaller from an interface between the piezoelectric layer and the electrode in a thickness direction, a ratio c/a of a lattice spacing a in a direction perpendicular to the thickness direction and a lattice spacing c in the thickness direction satisfies 0.986≤c/a≤1.002.
1 more element
Dependencies are inferred from the claim text.