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US 11,534,868 B2Granted
Device and method for separating a temporarily bonded substrate stack
AssigneeEV Group E. Thallner GmbH
InventorsElisabeth Brandl, Boris Povazay, Thomas Uhrmann
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Abstract
A method for separating a temporarily bonded substrate stack by bombardment of a joining layer of the substrate stack by means of laser beams emitted by a laser, characterised in that laser beams of the laser reflected and/or transmitted at the temporarily bonded substrate stack are detected during the bombardment of the joining layer with the laser beams. The invention also relates to a corresponding device.
Claims10
A method for separating a temporarily bonded substrate stack, said method comprising:
- bombarding a joining layer of the temporarily bonded substrate stack by means of laser beams emitted by a laser, the bombarding comprising illuminating a plurality of positions of the joining layer with the laser beams;
- detecting the laser beams of the laser that are reflected and/or transmitted at the temporarily bonded substrate stack during the bombarding of the joining layer with the laser beams, the detecting comprising:
- measuring the reflected and/or transmitted laser beams;
- and
- determining a power of the laser that is optimal for the bombarding of the joining layer;
- monitoring and/or adapting parameters of the laser during the bombarding of the joining layer;
- and
- aligning depth of focus range at each x-y position exactly on the joining layer by adjusting a z-position of the depth of focus range via one or more telescopes respectively located in paths of the laser beams.
5 more elements
A device for separating a temporarily bonded substrate stack, said device comprising:
- bombarding means for bombardment of a joining layer of the temporarily bonded substrate stack by means of laser beams emitted by a laser by illuminating a plurality of positions of the joining layer with the laser beams;
- detection means for detecting the laser beams of the laser that are reflected and/or transmitted at the temporarily bonded substrate stack and/or a reference substrate stack by measuring the reflected and/or transmitted laser beams and determining a power of the laser that is optimal for the bombarding of the joining layer;
- and
- one or more telescopes respectively located in paths of the laser beams, the telescopes being configured to align depth of focus range at each x-y position exactly on the joining layer by adjusting a z-position of the depth of focus range,
- wherein monitoring and/or adaptation of parameters of the laser takes place during the bombardment of the joining layer.
2 more elements
Dependencies are inferred from the claim text.