Crucible structure and method for forming isolating layer of crucible
AssigneeSino-American Silicon Products Inc.
InventorsYu-Min Yang, Huang-Wei Lin, Bo-Kai Wang, Sung-Lin Hsu, Ying-Ru Shih
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AssigneeSino-American Silicon Products Inc.
InventorsYu-Min Yang, Huang-Wei Lin, Bo-Kai Wang, Sung-Lin Hsu, Ying-Ru Shih
Estimating the term…
A method for forming an isolating layer of a crucible includes placing a round crucible sideways with a bottom surface of an inside thereof perpendicular to a horizontal plane, and then performing a plurality of spraying processes to form the isolating layer on the bottom surface and a wall surface of the round crucible. Each spraying process includes spraying a slurry on the bottom surface; using an optical positioner to set a spraying range the same as one of a plurality of partial areas divided from the wall surface; aligning one of the plurality of partial areas with the spraying range; fixing the round crucible and spraying the slurry in the spraying range; stopping the spraying; and rotating the round crucible to move another partial area to the spraying range. Then, the steps are repeated until the spraying of all the partial areas is completed.
A method for foiniing an isolating layer of a crucible, comprising:
Dependencies are inferred from the claim text.