Mist generator, film formation apparatus, and method of forming film using the film formation apparatus

A mist generator comprising:

• a reservoir storing a solution and having a cylindrical shape;
• a plurality of ultrasonic vibrators disposed under the reservoir and configured to apply ultrasonic vibration to the solution stored in the reservoir to generate mist of the solution in the reservoir;
• a mist delivery path configured to deliver the mist from an inside of the reservoir to an outside of the reservoir;
• a mist collector disposed above the solution in the reservoir, wherein an upper end of the mist collector is connected to an upstream end of the mist delivery path, a lower end of the mist collector including an opening, and a width of the mist collector increases from the upper end toward the opening;
• and
• a plurality of carrier gas supply paths configured to discharge carrier gas into the reservoir,
• wherein
• the plurality of ultrasonic vibrators is located directly under the opening,
• a discharge port of each of the plurality of carrier gas supply paths is located on a peripheral side of the reservoir that is radially outward from the opening,
• the plurality of carrier gas supply paths extends along a tangential direction of an inner lateral surface of the reservoir, and discharges the carrier gas along the inner lateral surface of the reservoir in a circumferential direction of the reservoir, and
• the carrier gas discharged from the plurality of carrier gas supply paths flows into the mist collector while flowing vortically along the inner lateral surface of the reservoir.