Particle beam apparatus
AssigneeSumitomo Heavy Industries, Ltd.
InventorYutaka Touchi
Life of this patent
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Abstract
A particle beam apparatus includes: an electromagnet to which each ion beam from a plurality of ion sources having different ion species is capable of being introduced, and from which one of the ion beams is capable of selectively exiting to a device on a downstream side by switching a magnetic field intensity, in which the electromagnet is capable of deflecting the one of the ion beam to be exited to the device on the downstream side toward the device on the downstream side, and is capable of reducing exit of a different type of beam mixed in the ion beam to the device on the downstream side, the different type of beam being different from the one of the ion beam.
Claims12
A particle beam apparatus comprising:
- an electromagnet to which each ion beam from a plurality of ion sources having different ion species is capable of being introduced, and from which one of the ion beams is capable of selectively exiting to a device on a downstream side by switching a magnetic field intensity;
- and
- a current measuring device into which one of the ion beams introduced into the electromagnet is incident, and which is capable of measuring a beam current of the ion beam,
- wherein the electromagnet is capable of deflecting the one of the ion beams to be exited to the device on the downstream side toward the device on the downstream side, and is capable of reducing exit of a different type of beam mixed in the ion beam to the device on the downstream side, the different type of beam being different from the one of the ion beams, and
- one of the ion beams different from the ion beam that is directed to the device on the downstream side is incident into the current measuring device.
Dependencies are inferred from the claim text.