Low-pressure plasma chamber, low-pressure plasma installation and method for producing a low-pressure plasma chamber

A low-pressure plasma chamber for a low-pressure plasma installation for plasma processing of a component in the low-pressure plasma chamber, the low-pressure plasma chamber comprising:

• a low-pressure plasma chamber body of glass, the glass not including quartz, wherein the low-pressure plasma chamber body is produced with a pressing method, wherein the low-pressure plasma chamber body is integrally formed as one piece;
• wherein a cross-section of the low-pressure plasma chamber body is constructed to be quadrilateral in regards to a plurality of inside surfaces and a plurality of outside surfaces;
• wherein the low-pressure plasma chamber has a door which can be opened and closed in a reversible manner without tools;
• and
• a pair of electrodes spaced apart and disposed facing one another adjacently located on an outside of a respective flat chamber wall configured to produce a homogeneous field line distribution of plasma within the low-pressure plasma chamber, wherein the pair of electrodes are non-curved and wherein the pair of electrodes and any additional electrodes are not disposed within the low-pressure plasma chamber.