Fluid control apparatus, fluid control method, and program recording medium in which program for fluid control apparatus is recorded

A method for controlling a fluid control apparatus including a control valve that is provided on a flow path and whose opening degree is changed in accordance with an applied voltage, a fluid sensor that measures a flow rate or a pressure of a fluid flowing through the flow path, and a voltage generation circuit that outputs a voltage according to an input voltage command to the control valve, the method comprising:

• controlling the control valve so as to reduce a deviation between a measured amount measured by the fluid sensor and a set amount by outputting a voltage to the control valve;
• and
• inputting a voltage command for setting an initial driving voltage to be applied to the control valve to the voltage generation circuit in a case where the control valve is changed from a fully closed state to a predetermined opening degree, wherein
• the control valve is one of a normally closed valve that is in a fully closed state in a state where no voltage is applied or a normally open valve that is in a fully open state in a state where no voltage is applied,
• the drive history information includes the number of times of opening and closing of the control valve, and
• a value of the initial driving voltage is changed in accordance with drive history information of the control valve.

A program recording medium in which a program used for a fluid control apparatus is recorded, the fluid control apparatus including:

• a control valve that is provided on a flow path and whose opening degree is changed in accordance with an applied voltage;
• a fluid sensor that measures a flow rate or a pressure of a fluid flowing through the flow path;
• and
• a voltage generation circuit that outputs a voltage according to an input voltage command to the control valve, wherein
• the program causes a computer to function as a valve controller that controls the control valve so as to reduce a deviation between a measured amount measured by the fluid sensor and a set amount,
• the valve controller includes an initial driving voltage setting unit that inputs a voltage command for setting an initial driving voltage to be applied to the control valve to the voltage generation circuit in a case where the control valve is changed from a fully closed state to a predetermined opening degree, and a drive history storage unit that stores therein drive history information of the control valve,
• the control valve is one of a normally closed valve that is in a fully closed state in a state where no voltage is applied or a normally open valve that is in a fully open state in a state where no voltage is applied,
• the drive history information includes the number of times of opening and closing of the control valve,
• the initial driving voltage setting unit changes a value of the initial driving voltage in accordance with the drive history information.