Adaptive control for a power generator
AssigneeMKS Instruments, Inc.
InventorsDavid J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith
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AssigneeMKS Instruments, Inc.
InventorsDavid J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith
Estimating the term…
A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
A system comprising:
An adaptive rate controller of a power generator configured to generate a power signal communicated to a non-linear load, comprising:
A power generator, comprising:
Dependencies are inferred from the claim text.