MEMS mirror arrangement for detecting a large angular range

A MEMS mirror arrangement for detecting an angular range of up to 180°, comprising:

• a carrier substrate on which a mirror which oscillates about at least one axis is suspended,
• a transparent cover which is connected to the carrier substrate in a hermetically sealed manner and which comprises a semi-shell dome with an ellipsoidal cross-sectional surface, said dome rising above an essentially circular base surface, wherein the dome is provided with an inner dome shell and an outer dome shell which form boundary surfaces and the ratio of the height F to the diameter D of the inner and/or outer dome shell is between 0.4 and 0.6 and the difference between the ratio of the height Fi to the diameter Di of the inner dome shell and the ratio of the height Fa to the diameter Da of the outer dome shell lies between ±0.002 and
• compensation optics which are arranged outside the dome in a predefined beam path for an incident beam bundle,
• wherein the middle of the mirror coincides with the middle point of the base surface of the dome with a maximum tolerance of ±20% of the diameter of the base surface of the dome and
• wherein the compensation optics collimate the incident beam bundle in a manner such that a divergence or convergence of the beam bundle, caused by the boundary surfaces of the dome, is at least partly compensated after exit from the dome.