Laser beam positioning method using a patterned mirror

A laser beam alignment system, comprising:

• a first deflection system and a second deflection system arranged downstream thereof, said deflection systems each comprising:
• a frame, and a mirror having a mirror surface for reflecting a portion of a laser beam incident on said mirror surface as a reflected beam portion;
• the first deflection system further comprising a movement system connected to the frame and to the mirror for positioning the mirror relative to the frame to adjust the angle of the reflected beam portion relative to the mirror surface;
• the second deflection system further comprising:
• a plurality of elements arranged in a pattern at the mirror surface of the second deflection system, for deflecting a portion of the laser beam incident on the elements as a deflected beam portion that is different from the reflected beam portion reflected by said mirror;
• and
• one or more detectors, arranged outside the path of the reflected beam portion, for detecting at least part of the deflected beam portion;
• at least one controller configured to communicate with the movement system of the first mirror deflection system and the one or more detectors of the second mirror deflection system, and to control said movement system to position the first mirror relative to the frame to align the laser beam on the second mirror based on the detected part of the deflected beam portion.