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US 11,531,146 B2Granted
Thermal undercut structure for metasurface tuning
AssigneeSeagate Technology LLC
InventorsAditya Jain, Zoran Jandric, Dan Mohr, Kevin A. Gomez, Krishnan Subramanian
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Abstract
An active metasurface includes a number of periodically-repeated unit cells arranged on a substrate, each of the unit cells including a high-index dielectric block; a heat source positioned to selectively modulate heat applied to the high-index dielectric block; and an insulating undercut region at an interface between the high-index dielectric block and the substrate.
Claims19
A metasurface comprising:
- a number of periodically-repeated unit cells arranged on a substrate, each of the unit cells including:
- a high-index dielectric block;
- a heat source positioned to selectively modulate heat applied to the high-index dielectric block;
- and
- an insulating undercut region at an interface between the high-index dielectric block and the substrate, wherein the metasurface receives light through the substrate and reflects the light out through the substrate after the light is phase-shifted by the high-index dielectric block.
2 more elements
A method comprising:
- selectively modulating heat applied to a high-index dielectric block in each cell of a plurality of periodically-repeated unit cells arranged on a substrate, each cell in the plurality of periodically-repeated unit cells being separated from the substrate by an insulating undercut region, wherein light is received through the substrate and reflected out of the substrate after light is phase-shifted by the high-index dielectric block.
A system comprising:
- a high-index dielectric block;
- an electrode thermally coupled to the high-index dielectric block through a spacer layer;
- an insulating undercut region at an interface between the high-index dielectric block and an adjacent substrate;
- and
- an index modulation controller that modulates a voltage applied to the electrode to controllably alter an index of the high-index dielectric block, wherein light is received through the adjacent substrate and reflected out of the adjacent substrate once the light has been phase shifted by the high-index dielectric block.
2 more elements
Dependencies are inferred from the claim text.