Measurement apparatus and measurement method
AssigneeMitutoyo Corporation
InventorShinji Komatsuzaki
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AssigneeMitutoyo Corporation
InventorShinji Komatsuzaki
Estimating the term…
A measurement apparatus that includes a laser apparatus outputting a frequency-modulated laser beam, a branching part branching the frequency-modulated laser beam into a reference light and a measurement light, a beat signal generation part generating a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured, an extraction part extracting a signal component corresponding to a resonator frequency of the frequency-modulated laser beam, a clock signal generation part generating a first clock signal on the basis of the signal component, a conversion part converting the beat signal into a first digital signal using the first clock signal, and a calculation part calculating a difference in a propagation distance between the reference light and the measurement light on the basis of the first digital signal.
A measurement apparatus, comprising:
A measurement method comprising:
A light measurement apparatus, comprising:
Dependencies are inferred from the claim text.