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US 11,531,041 B2Granted
Sensor system, including a plurality of individual and separate sensor elements
AssigneeRobert Bosch GmbH
InventorsAmin Jemili, Joerg Braeuer, Johannes Classen
Life of this patent
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Abstract
A sensor system including a plurality of individual and separate sensor elements. Each of the individual sensor elements is independently functional. The individual sensor elements of the sensor system being formed in one piece from parts of a wafer or a vertically integrated wafer stack. The sensor system including at least one separation structure, in particular a scribe line, between the individual and separate sensor elements.
Claims11
A sensor system, comprising:
- a plurality of individual and separate sensor elements, wherein each of the individual sensor elements is independently functional and the individual sensor elements of the sensor system are each formed in one piece from parts of a wafer or a vertically integrated wafer stack;
- and
- at least one separation structure between the individual and separate sensor elements,
- wherein the sensor system is configured, with respect to an evaluation of the individual and separate sensor elements, in such a way that an arithmetic averaging of measured values of the individual and separate sensor elements is carried out, and/or that a weighted averaging of the measured values of the individual and separate sensor elements is carried out,
- wherein the individual and separate sensor elements of the sensor system, with the exception of a connection via a substrate potential, are exclusively mechanically connected to one another or are only electrically connected to one another via a redistribution level.
2 more elements
Dependencies are inferred from the claim text.