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US 11,530,917 B2Granted
Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorsEugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc Steven Weinberg, William Sawyer
Life of this patent
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Abstract
Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
Claims8
A method for fabricating tuning fork gyroscope sensor, comprising:
- fabricating at least one sense plate on a silicon sense plate wafer;
- bonding the sense plate wafer to a device layer in which a proof mass is formed;
- and
- forming through silicon vias through the sense plate wafer having the sense plate and filling the vias to provide electrical connections to the sense plate to form the tuning fork gyroscope sensor;
- wherein the bonding the sense plate wafer to the device layer is performed in a vacuum to yield a vacuum sealed sensor.
2 more elements
A method for fabricating a tuning fork gyroscope sensor, comprising:
- fabricating at least one sense plate on a silicon sense plate wafer;
- bonding the sense plate wafer to a device layer in which a proof mass is formed;
- forming through silicon vias through the sense plate wafer having the sense plate and filling the vias to provide electrical connections to the sense plate to form the tuning fork gyroscope sensor;
- providing a sealing ring around the proof mass;
- and
- evacuating a volumetric region in the sealing ring and around the proof mass.
3 more elements
Dependencies are inferred from the claim text.