Cold head, superconducting magnet, examination apparatus, and cryopump
AssigneesKabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.
InventorsKatsuhiko Yamada, Keiichi Fuse
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Abstract
A reduction in a permeability of refrigerant gas is suppressed while increasing a filling factor of regenerator material particles with respect to a stage of a cold head. A cold head includes a stage including regenerator material particle groups, and a metal mesh material partitioning the regenerator material particle groups. The metal mesh material has quadrangular mesh holes each having a length of a long side of 1/10 or more and ½ or less of each of average particle sizes of the regenerator material particle groups.
Claims14
A method for manufacturing a cold head, comprising:
- preparing a regenerator container;
- filling a first regenerator material particle group having an average particle size in a range from 200 μm to 380 μm in the regenerator container;
- filling a plurality of metal mesh materials on the first regenerator material particle group in the regenerator container;
- and
- filling a second regenerator material particle group having an average particle size in a range from 200 μm to 380 μm on the plurality of metal mesh materials in the regenerator container so that the second regenerator material particle group is partitioned with the first regenerator material particle group by the plurality of metal mesh materials,
- wherein each of the plurality of metal mesh materials has quadrangular mesh holes each having a length of a long side in a range from 1/10 to ½ of each of the average particle sizes of the first and second regenerator material particle groups,
- wherein each of the plurality of metal mesh materials has metal wires woven in a mesh form, and each of the metal wires has a wire diameter in a range from 20 μm to 90 μm,
- wherein the plurality of metal mesh materials are stacked so that positions of the mesh holes in the plurality of the metal mesh materials do not match, and
- wherein a length of one side of each of the mesh holes in one of the plurality of metal mesh materials is different from a length of one side of each of the mesh holes in another one of the plurality of the metal mesh materials.
Dependencies are inferred from the claim text.