Method for forming a hydrophobic and icephobic coating
AssigneeApplied Materials, Inc.
InventorsRajeev Bajaj, Mei Chang, Deenesh Padhi
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Abstract
A method of depositing a coating and a layered structure is provided. A coating is deposited on a substrate to make a layered structure, such that an interface between the coating and the substrate is formed. The coating includes silicon, oxygen, and carbon, where the carbon doping in the coating increases between the interface and the top surface of the coating. The top surface of the coating is inherently hydrophobic and icephobic, and reduces the wetting of water or ice film on the layered structure, without requiring reapplication of the coating.
Claims18
A method of depositing a coating, comprising:
- depositing the coating on a substrate, wherein:
- the substrate is at least partially transparent to visible light,
- the coating comprises silicon (Si), oxygen (O), and carbon (C),
- the coating is deposited such that an interface is formed between the substrate and the coating,
- a concentration of C in the coating is greater at a top surface of the coating than the interface, wherein a variation of concentration of C in the coating is substantially linear between the interface and the top surface, wherein the concentration of C in the coating is increased by reducing a radiofrequency power as the coating is deposited from the interface to the top surface, and
- the top surface of the coating is disposed on the opposite side of the coating than the interface.
A method of depositing a coating, comprising:
- exposing a substrate to a gas mixture comprising a silicon-containing precursor, an oxygen-containing precursor, and a carbon-containing precursor, wherein the substrate is at least partially transparent to visible light;
- applying a first radio frequency power to the gas mixture;
- forming an interface of the coating on the substrate, the interface comprising silicon (Si), oxygen (O), and a first concentration carbon (C);
- and
- reducing the first radio frequency power to a second radio frequency applied to the gas mixture to increase a concentration of C to a second concentration of C at a top surface of the coating.
Dependencies are inferred from the claim text.