Lubricant solution, method for producing substrate provided with lubricant coating film
AssigneeAGC Inc.
InventorsToshio Miki, Hiroaki Mitsuoka
Life of this patent
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AssigneeAGC Inc.
InventorsToshio Miki, Hiroaki Mitsuoka
Estimating the term…
To provide a lubricant solution capable of forming a uniform coating film by using a solvent composition which has a small impact on the global environment and which is excellent in solubility of the fluorinated ether compound, and a method for producing a substrate provided with a lubricant coating film. A lubricant solution comprising a solvent composition which comprises a HCFO and at least one member selected from the group consisting of 1,1,1,2,2,3,3,4,4,5,5,6,6-tridecafluorohexane, 1,1,1,2,2,3,3,4,4,5,5,6,6-tridecafluorooctane, nonafluorobutyl methyl ether, nonafluorobutyl ethyl ether and 3-methoxy-4-trifluoromethyl-1,1,1,2,2,3,4,5,5,5-decafluoropentane, and a fluorinated ether compound which is a fluorinated ether compound having a perfluoropolyether chain and CF3 groups at both terminals, wherein the perfluoropolyether chain does not have a branched structure.
A lubricant solution, comprising:
Dependencies are inferred from the claim text.