CD73 inhibitors

A compound of Formula (I), or a pharmaceutically acceptable salt thereof:

• wherein:
• Q1 is CW;
• Q2 is N and Q3 is N;
• W is hydrogen;
• R1 and R2 are independently hydrogen, C1-C6 alkyl, C1-C6 haloalkyl, C1-C6 hydroxyalkyl, cycloalkyl, heterocycloalkyl, aryl, heteroaryl, C1-C6 alkyl(aryl), C1-C6 alkyl(heteroaryl), C1-C6 alkyl(cycloalkyl), or C1-C6 alkyl(heterocycloalkyl);
• wherein each alkyl, cycloalkyl, heterocycloalkyl, aryl, and heteroaryl is independently optionally substituted with one, two, or three R1a;
• each R1a is independently halogen, —CN, C1-C6 alkyl, C1-C6 fluoroalkyl, or C1-C6 hydroxyaikyl;
• R3 is hydrogen, halogen, —CN, —ORb, —SRb, C1-C6 alkyl, C2-C6 alkynyl, or C1-C6 hydroxyalkyl;
• wherein the alkyl and alkynyl is independently optionally substituted with one, two, or three R3a;
• each R3a is halogen, C1-C6 alkyl, C1-C6 fluoroalkyl, C1-C6 hydroxyalkyl, or cycloalkyl;
• R4 and R5 are ORb;
• R6 is hydrogen, deuterium, halogen C1-C6 alkyl, C1-C6 haloalkyl, C1-C6 deuteroalkyl, C1-C6 hydroxyalkyl, C1-C6 heteroalkyl, or heterocycloalkyl;
• wherein the alkyl is independently optionally substituted with one, two, or three R6a;
• each R6a is —OR13, C1-C6 alkyl, C1-C6 haloalkyl, C1-C6 deuteroalkyl, C1-C6 hydroxyalkyl, C1-C6 heteroalkyl, cycloalkyl, or heteroaryl;
• R7, R8, R9, and R10 are independently hydrogen, deuterium, or C1-C6 alkyl;
• X is —S— or —O—;
• Ring A is heterocycloalkyl or heteroaryl;
• each RA is independently halogen, —CN, —ORb, —SRb, C1-C6 alkyl, C1-C6 haloalkyl, or C1-C6 hydroxyalkyl;
• n is 0, 1, 2, 3, or 4;
• each R13 is independently hydrogen, C1-C6 alkyl, C1-C6 haloalkyl, or C1-C6 deuteroalkyl;
• R21 and R22 are independently hydrogen or C1-C20 alkyl;
• and
• each Rb is independently hydrogen or C1-C6 alkyl;
• provided that the compound is not