Nozzle, substrate processing apparatus including the same, and substrate processing method
AssigneeSemes Co., Ltd.
InventorsSunmi Kim, Oh Jin Kwon, Sehyeong Choi
Life of this patent
Estimating the term…
Abstract
The inventive concept provides a nozzle for dispensing a treatment liquid in which plasma is generated. The nozzle includes a body having an interior space, a liquid supply unit that supplies the treatment liquid into the interior space, and electrodes that generate the plasma in the interior space. The liquid supply unit supplies the treatment liquid in a bubbling state into the interior space, or causes the treatment liquid to bubble in the interior space.
Claims19
An apparatus for processing a substrate, the apparatus comprising:
- a housing having a processing space;
- a support unit configured to support the substrate in the processing space;
- and
- a liquid dispensing unit including a nozzle configured to dispense a treatment liquid onto the substrate supported on the support unit,
- wherein the nozzle includes
- a body comprising an insulator wall and including an interior space, enclosed by the insulator wall, the body including (1) a recess defined by the insulator wall at an upper portion of the body and (2) a dispensing opening at a lower portion of the body, the dispensing opening configured to dispense the treatment liquid,
- a liquid supply unit configured to supply the treatment liquid into the interior space,
- a gas supply unit configured to supply a gas into the interior space, and
- electrodes configured to generate plasma in the interior space, the electrodes including a first electrode and a second electrode, the first electrode being inserted into the recess to be separated from the interior space by the insulator wall, the second electrode being on an exterior of the body and surrounding the interior space of the body, and
- wherein the liquid supply unit supplies the treatment liquid in a bubbling state into the interior space, or causes the treatment liquid to bubble in the interior space.
A nozzle for dispensing a treatment liquid in which plasma is generated, the nozzle comprising:
- a body comprising an insulator wall and including an interior space enclosed by the insulator wall, the body including (1) a recess defined by the insulator wall at an upper portion of the body and (2) a dispensing opening at a lower portion of the body, the dispensing opening configured to dispense the treatment liquid;
- a liquid supply unit configured to supply the treatment liquid into the interior space;
- and
- electrodes configured to generate the plasma in the interior space, the electrodes including a first electrode and a second electrode, the first electrode being inserted into the recess to be separated from the interior space by the insulator wall, the second electrode being on an exterior of the body to surround the interior space of the body,
- wherein the liquid supply unit supplies the treatment liquid in a bubbling state into the interior space, or causes the treatment liquid to bubble in the interior space.
Dependencies are inferred from the claim text.