Piezoelectric film, piezoelectric module, and method of manufacturing piezoelectric film

A piezoelectric film comprising:

• a substrate having flexibility, the substrate including a first layer and a second layer that are laminated to each other;
• and
• at least two piezoelectric elements provided to the substrate so as to be arranged at intervals of a first dimension along a first direction, the at least two piezoelectric elements being directly adjacent to each other,
• wherein the at least two piezoelectric elements are each configured by stacking a first electrode film, a piezoelectric layer made of an inorganic material, and a second electrode film along a thickness direction of the substrate,
• an area of the substrate between the piezoelectric elements directly adjacent to each other along the first direction forms a vibrational region which can be displaced in the thickness direction, and
• a slit groove having a predetermined depth dimension along the thickness direction is disposed at a center of the vibrational region in the first direction of the substrate along a second direction intersecting the first direction, the slit groove penetrating the first layer and exposing an upper surface of the second layer.