Filter device
AssigneeSMC Corporation
InventorsMitsuhiro Kurihara, Kenji Fukushima
Life of this patent
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Abstract
A negative pressure-side flow path having a negative pressure-side filter and a positive pressure-side flow path having a positive pressure-side filter are connected in parallel between a first port and a second port, and a shuttle valve is installed between the negative pressure-side flow path and the positive pressure-side flow path, and the first port, thus when a negative pressure is supplied to the first port, the first port is caused to communicate with the second port through the negative pressure-side flow path, and when a positive pressure is supplied to the first port, the first port is caused to communicate with the second port through the positive pressure-side flow path.
Claims8
A filter device which is installed in a flow path and filters foreign substances from a gas which flows through the flow path to which a pressure selectively switched between a negative pressure and a positive pressure is supplied, the filter device comprising:
- a first port for selectively switching between and inputting a negative pressure and a positive pressure;
- a second port for outputting to an outside the negative pressure and the positive pressure inputted from the first port;
- and a negative pressure-side filter and a positive pressure-side filter which are disposed between the first port and the second port, and connected in parallel to the first and second ports,
- the negative pressure-side filter has a breathable negative pressure-side filter element to filter foreign substances from a gas which flows from the second port to the first port, and the positive pressure-side filter has a breathable positive pressure-side filter element to filter foreign substances from a gas which flows from the first port to the second port,
- a shuttle valve is disposed between the first port, and the negative pressure-side and positive pressure-side filters, and
- the shuttle valve has a valve disc such that when a negative pressure is supplied to the first port, the valve disc opens communication between the first port and the negative pressure-side filter to output the negative pressure from the second port, and simultaneously blocks communication between the first port and the positive pressure-side filter, whereas when a positive pressure is supplied to the first port, the valve disc opens communication between the first port and the positive pressure-side filter to output the positive pressure from the second port, and simultaneously blocks communication between the first port and the negative pressure-side filter.
Dependencies are inferred from the claim text.