Systems, devices, and methods for high quality ion beam formation
AssigneeTae Technologies, Inc.
InventorsAlexander Dunaevsky, Artem N. Smirnov, Alexandr A. Ivanov, Vladislav Vekselman
Life of this patent
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Abstract
Embodiments of systems, devices, and methods relating to a beam system. An example beam system includes a charged particle source configured to generate a beam of charged particles, a pre-accelerator system configured to accelerate the beam, and an accelerator configured to accelerate the beam from the pre-accelerator system. The pre-accelerator system can cause the beam to converge as it is propagated from the source to an input aperture of the accelerator. The pre-accelerator system can further reduce or eliminate source disturbance or damage caused by backflow traveling from the accelerator toward the source.
Claims126
A beam system, comprising:
- a particle source configured to emit a charged particle beam;
- a pre-accelerator system configured to accelerate the charged particle beam from the particle source, wherein the pre-accelerator system comprises a pre-accelerator device comprising a pre-accelerator tube having a plurality of acceleration terminals;
- and
- a tandem accelerator configured to accelerate the charged particle beam from the pre-accelerator system.
A method of operating a beam system, the method comprising:
- emitting a beam comprising charged particles from a particle source;
- accelerating the beam with a pre-accelerator system towards a tandem accelerator, wherein the pre-accelerator system comprises a pre-accelerator device comprising a pre-accelerator tube having a plurality of acceleration terminals;
- and
- accelerating the beam with the tandem accelerator.
A beam system, comprising:
- a particle source configured to emit a charged particle beam;
- a pre-accelerator system configured to accelerate the charged particle beam from the particle source, wherein the pre-accelerator system comprises a pre-accelerator device comprising a pre-accelerator tube having a plurality of acceleration terminals;
- an accelerator configured to accelerate the charged particle beam from the pre-accelerator system;
- and
- a lithium target device configured to form a neutral beam from the charged particle beam.
A method of operating a beam system, the method comprising:
- emitting a beam comprising charged particles from a particle source;
- accelerating the beam with a pre-accelerator system towards an accelerator, wherein the pre-accelerator system comprises a pre-accelerator device comprising a pre-accelerator tube having a plurality of acceleration terminals;
- and
- accelerating the beam, with the accelerator, into a lithium target such that a neutral beam is formed from the charged particle beam.
A beam system, comprising:
- a particle source configured to emit a charged particle beam;
- a pre-accelerator system configured to accelerate the charged particle beam from the particle source, wherein the pre-accelerator system comprises an einzel lens, a pre-accelerator tube comprising a plurality of acceleration terminals, and a solenoid;
- and
- an accelerator configured to accelerate the charged particle beam from the pre-accelerator system.
A method of operating a beam system, the method comprising:
- emitting a beam comprising charged particles from a particle source;
- accelerating the beam with a pre-accelerator system towards an accelerator, wherein the pre-accelerator system comprises an einzel lens, a pre-accelerator tube comprising a plurality of acceleration terminals, and a solenoid;
- and
- accelerating the beam with the accelerator.
A beam system, comprising:
- a particle source configured to emit a charged particle beam;
- a pre-accelerator system configured to accelerate the charged particle beam from the particle source;
- and
- an accelerator configured to accelerate the charged particle beam from the pre-accelerator system,
- wherein power to the pre-accelerator system is adjustable to control defocus of backflow from the accelerator.
The beam system of 101, further comprising a target device configured to form a neutral beam from the charged particle beam.
A method of operating a beam system, the method comprising:
- emitting a beam comprising charged particles from a particle source;
- accelerating the beam with a pre-accelerator system towards an accelerator;
- accelerating the beam with the accelerator;
- and
- defocusing backflow from the accelerator with the pre-accelerator system by adjusting power supplied to the pre-accelerator system.
Dependencies are inferred from the claim text.