Lamp device, exposure apparatus, and method of manufacturing article

A method of manufacturing an article, the method comprising;

• exposing a substrate using an exposure apparatus;
• and
• processing the substrate exposed in the exposing,
• wherein the article is manufactured from the substrate processed in the processing,
• wherein the exposure apparatus comprises a holding device configured to hold a lamp device,
• wherein the holding device includes a gas supply port configured to supply a gas to an inside of a bayonet cap portion in the lamp device via a first opening of the lamp device, and a gas exhaust port configured to exhaust the gas from the inside of the bayonet cap portion via a second opening of the lamp device, and
• wherein the lamp device comprises:
• a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other;
• and
• the bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes,
• wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.

A lamp device comprising:

• a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other;
• and
• a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes,
• wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion,
• wherein the lamp device is held by a holding device including a gas supply port and a gas exhaust port, and
• wherein the bayonet cap portion includes the first opening in the bottom surface at a position overlapping with the gas supply port and the second opening in the bottom surface at a position overlapping with the gas exhaust port in a state in which the lamp device is held by the holding device.

An exposure apparatus that exposes a substrate, comprising:

• a holding device configured to hold a lamp device,
• wherein the lamp device comprises:
• a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other;
• and
• a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes,
• wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion, and
• wherein the holding device includes a gas supply port configured to supply a gas to the inside of the bayonet cap portion in the lamp device via the first opening of the lamp device, and a gas exhaust port configured to exhaust the gas from the inside of the bayonet cap portion via the second opening of the lamp device.