Ion gun and vacuum processing apparatus

An ion beam adjusting method adjusting an ion beam ejected from a gap in an ion gun including an anode, a cathode opposed to the anode and having a first portion and a second portion, and a magnet configured to form a magnetic field space between the first portion and the second portion, wherein the gap is an annular gap including a linear portion and a curved portion and provided between the first portion and the second portion of the cathode,

• the method comprising:
• adjusting a center position of an ion beam ejected from the gap by shifting a position of a bottom of a magnetic field line formed between the first portion and the second portion in the curved portion toward inside of a cross-sectional centerline of the gap.

An ion beam adjusting method adjusting an ion beam ejected from a gap in an ion gun including an anode, a cathode opposed to the anode and having a first portion and a second portion, and a magnet configured to form a magnetic field space between the first portion and the second portion, wherein the gap is an annular gap including a linear portion and a curved portion and provided between the first portion and the second portion of the cathode, wherein the first portion is arranged inside with respect to the gap and the second portion is arranged outside with respect to the gap, and wherein the magnet is configured to form, in a space between the first portion and the second portion and the anode, a magnetic field line in a direction from the second portion to the first portion,

• the method comprising:
• adjusting a center position of an ion beam ejected from the gap by inclining in the curved portion, a magnetic field vector at a point where the magnetic field line and a cross-sectional centerline of the gap intersect with each other toward the anode with respect to a plane orthogonal to the cross-sectional centerline.