Catadioptric lens and optical system comprising such a lens
AssigneeCarl Zeiss SMT GmbH
InventorsKonstantin Forcht, Dirk Doering
Life of this patent
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Abstract
A catadioptric lens includes at least two optical elements arranged along an optical axis. Both optical elements are configured as a mirror having a substrate and a highly reflective coating applied to an interface of the substrate. The highly reflective coating extends from the interface of the substrate along a surface normal. At least one of the highly reflective coatings has one or a plurality of layers. The optical total layer thickness of the one layer of the plurality of layers increases radially from the inner area outward.
Claims20
A catadioptric lens having an optical axis, the catadioptric lens comprising:
- a first mirror comprising a first substrate and a first reflective coating on a first boundary layer of the first substrate, the first reflective coating extending from the first boundary layer along a first surface normal;
- and
- a second mirror comprising a second substrate and a second reflective coating on a second boundary layer of the second substrate, the second reflective coating extending from the second boundary layer along a second surface normal,
- wherein:
- the first and second mirrors are arranged along the optical axis;
- the first reflective coating comprises one or more first plies;
- an optical overall layer thickness of the one or more first plies increases along a radial direction extending outwardly from the optical axis;
- the
- the catadioptric lens is configured so that, for a used wavelength range of light of the catadioptric lens, after the light reflects from a reflective coating of an optical element of the catadioptric lens, the catadioptric lens reduces by a factor of at least two a phase retardation between radially and tangentially polarized light by:
- i) reflection of the light at at least one coating selected from the group consisting of the first reflective coating and the second reflective coating;
- or
- ii) transmission of the light through an anti-reflection coating of a mirror selected from the group consisting the first mirror and the second mirror;
- the used wavelength range of light has a minimum wavelength of light and a maximum wavelength of light;
- and
- the maximum wavelength of light is at least 1.1 times the minimum wavelength of light.
Dependencies are inferred from the claim text.