Method of examining a sample using a charged particle microscope

A method of examining a sample using a charged particle microscope, comprising:

• Providing a pre-selected range of consecutive color hues;
• Scanning said sample with a charged particle beam;
• Detecting emissions from the sample in response to the beam scanned over the sample;
• Assigning a plurality of mutually different phases to said sample based on spectral information of the detected emissions;
• Providing one or more adjustment variables, using at least spectral information of the detected emissions;
• Selecting a plurality of different color hues from said pre-selected range of consecutive color hues based on said adjustment variables;
• and
• Associating said selected different color hues to said plurality of mutually different phases.

A charged particle microscope for examining a sample, comprising:

• an optics column, including a charged particle source, a final probe forming lens and a scanner, for focusing a beam of charged particles emitted from said charged particle source onto a specimen;
• a specimen stage positioned downstream of said final probe forming lens and arranged for holding said specimen;
• a detector for detecting emissions from said specimen in response to the incidence of charged particles emitted from said charged particle source;
• a control unit and a processing device connected to said first detector, the control unit is configured to:
• provide a pre-selected range of consecutive color hues;
• scan said sample with the charged particle beam;
• detect emissions with the detector;
• assign a plurality of mutually different phases to said sample based on spectral information of the detected emissions;
• select a plurality of color hues from said pre-selected range;
• and
• associate said selected color hues to said plurality of mutually different phases.