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US 11,519,669 B2Granted
Condenser and semiconductor processing machine
AssigneeChangxin Memory Technologies, Inc.
InventorTianlong Li
Life of this patent
Estimating the term…
Abstract
A condenser and semiconductor processing machine, relating to the art of semiconductor equipment. The condenser 100 includes a sealed cavity; wherein, a gas passage is provided in the sealed cavity; cooling liquid is filled around the gas passage; a gas inlet, a gas outlet, and a liquid outlet are provided on the sealed cavity, the gas inlet is communicated with the inlet of the gas passage, the gas outlet is communicated with the outlet of the gas passage, and the liquid outlet is communicated with the gas passage; the gas passage is a Tesla valve structure passage.
Claims9
A condenser, comprising:
- a sealed cavity;
- a gas passage provided inside the sealed cavity, cooling liquid is filled around the gas passage;
- and
- a gas inlet, a gas outlet and a liquid outlet provided on the sealed cavity,
- the gas inlet is connected to an inlet of the gas passage, the gas outlet is connected to an outlet of the gas passage, and the liquid outlet is connected to the gas passage;
- wherein:
- the gas passage is a Tesla valve structure passage,
- the sealed cavity comprises a first cavity and a second cavity hermetically connected,
- a plurality of protrusions are arranged at intervals in the first cavity,
- a holding chamber is provided in the second cavity, and
- the plurality of protrusions are embedded in the holding chamber to form the Tesla valve structure passage.
8 more elements
Dependencies are inferred from the claim text.