Fluid composition and method for conducting a material removing operation

A method of polishing a substrate, comprising:

• providing a fluid composition, wherein the fluid composition comprises a multi-valent metal borate, at least one oxidizing agent and water;
• bringing the fluid composition in contact with the substrate and a polishing pad;
• and
• polishing the substrate,
• wherein the multi-valent metal borate includes iron(III)borate, copper(II)borate, or a combination thereof;
• and the oxidizing agent includes a permanganate salt in an amount of at least 1 wt % and not greater than 10 wt %, and a pH of the fluid composition is not greater than 5.

A kit adapted for preparing a fluid for polishing a substrate, the kit comprising a first package and a second package, wherein the first package comprises a multi-valent metal salt, wherein an anion of the multi-valent metal salt includes nitrate, chloride, bromide, iodide, sulfate, phosphate, or any combination thereof;

• the second package comprises boric acid;
• the first package or the second package further comprise at least one oxidizing agent, the oxidizing agent including a permanganate salt;
• and
• the kit is adapted for preparing a fluid for polishing a substrate
• wherein an amount of the permanganate salt of the fluid after combining the first and the second package is at least 1 wt % and not greater than 10 wt %, and a pH of the fluid is not greater than 5.