Integrated process for the manufacture of methylchlorohydridomonosilanes

A process for the manufacture of methylchlorohydridomonosilanes, selected from the group consisting of Me2Si(H)Cl, MeSi(H)Cl2, and MeSi(H)2Cl, comprising:

• subjecting a silane substrate comprising at least one silane selected from the group consisting of:
• (i) monosilanes,
• (ii) disilanes,
• (iii) oligosilanes, and
• (iv) carbodisilanes,
• with the proviso that the at least one silane (i) to (iv) has at least one chloro substituent,
• a) to a hydrogenation reaction with LiH, and
• b) to a redistribution reaction, and
• c) optionally to a cleavage reaction of the Si—Si bonds of the di- or oligosilanes or the Si—C-bond of the carbodisilanes, and
• d) to a separating step of the methylchlorohydridosilanes,
• wherein the process is carried out in the presence of an ether solvent having a boiling point of greater than 70° C., in the absence of AlCl3, and wherein
• (i) the monosilanes are selected from the group consisting of the general formula (I),
• MexSiHyClz (I),
• wherein
• x=1 to 3,
• y=0 to 3,
• z=0 to 3, and
• x+y+z=4,
• (ii) the disilanes are selected from the group consisting of the general empirical formula (II),
• MemSi2HnClo (II)
• wherein
• m=1 to 6,
• n=0 to 5
• o=0 to 5 and
• m+n+o=6,
• (iii) oligosilanes are selected from the group consisting of linear or branched oligosilanes of the general empirical formula (III)
• MepSiqHrCls (III),
• wherein
• q=3-7
• p=q to (2q+2)
• r, s=0 to (q+2)
• r+s=(2q+2)−p,
• (iv) carbodisilanes are selected from the group consisting of the general formula (IV)
• (MeaSiHbCle)—CH2-(MecSiHdClf) (IV)
• wherein
• a, c are independently of each other 1 to 3,
• b, d are independently from each other 0 to 2
• e, f are independently from each other 0 to 2,
• a+b+e=3,
• c+d+f=3 and,
• wherein the process further comprises the step of separating the LiCl formed and the step of regeneration of LiH from the separated LiCl, and wherein the process is conducted at a temperature of from about −40° C. to about 250° C. and wherein the hydrogenation reaction a), the redistribution reaction b) and the cleavage reaction c) are carried out simultaneously.