Force feedback actuator for a MEMS transducer
AssigneeKnowles Electronics, LLC
InventorsMohsin Nawaz, Stephen C. Thompson, Michael Pedersen, Peter V. Loeppert, Zouhair Sbiaa
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Abstract
A force feedback actuator includes a pair of electrodes and a dielectric member. The pair of electrodes are spaced apart from one another to form a gap. The dielectric member is disposed at least partially within the gap. The dielectric member includes a first portion having a first permittivity and a second portion having a second permittivity that is different from the first permittivity. The dielectric member and the pair of electrodes are configured for movement relative to each other.
Claims21
A force feedback actuator, comprising:
- a pair of electrodes spaced apart from one another to form a gap;
- and
- a dielectric member disposed at least partially within the gap, the dielectric member comprising a first portion having a first permittivity and a second portion having a second permittivity, the dielectric member and the pair of electrodes are configured for movement relative to each other.
A microelectromechanical systems (MEMS) capacitive transducer comprising:
- a chamber;
- a first electrode disposed in the chamber;
- a second electrode disposed in the chamber and spaced apart from the first electrode, the first electrode electrically isolated from the second electrode;
- a dielectric member disposed in the chamber, the dielectric member located at least partially between the first and second electrodes depending on a degree of relative movement between the dielectric member and the first and second electrodes,
- the dielectric member comprising a first portion having a first permittivity and a second portion having a second permittivity.
Dependencies are inferred from the claim text.