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US 11,515,131 B2Granted
System for focused deposition of atomic vapors
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorIsaac Ehrenberg
Life of this patent
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Abstract
A thin-film system comprising a microplasma region where sputtered particles are formed, a power supply that supplies power to the microplasma region, gas flow hardware to regulate flow of gas to the microplasma region, a deposition nozzle that forms a thin film on a substrate and a supply line for supplying sputtered particles to the deposition nozzle, wherein the microplasma region is decoupled from the deposition nozzle.
Claims10
A thin-film system comprising:
- a microplasma region where sputtered particles are formed;
- a power supply that supplies power to the microplasma region;
- gas flow hardware to regulate flow of gas to the microplasma region;
- a deposition nozzle that forms a thin film on a substrate;
- and
- a supply line for supplying the sputtered particles to the deposition nozzle through a transfer junction, wherein the microplasma region is decoupled from the deposition nozzle.
3 more elements
A thin-film system comprising:
- a plurality of sputtering/micro-plasma stations where sputtered particles are formed;
- a deposition nozzle that forms a thin film by depositing the sputtered particles on a substrate;
- a supply line that supplies sputtered particles from the plurality of sputtering/micro-plasma stations to the deposition nozzle and
- a transfer junction that supplies a selected source of sputtered particles from the plurality of sputtering/micro-plasma stations to the deposition nozzle.
1 more element
A micro-sputtering chamber for use in a thin-film system, the micro-sputtering chamber comprising:
- a gas inlet passage;
- a gas outlet passage;
- electrodes positioned on opposite sides of the micro-sputtering chamber;
- a glass cube in which a plasma chamber is formed, the glass cube having holes formed therein that allow gas to flow to the plasma chamber and holes to hold a target material;
- and
- an outer part in which the glass cube is formed for holding the electrodes, the gas inlet passage and the gas outlet passage.
3 more elements
Dependencies are inferred from the claim text.