Process gas suction structure and exhaust gas treatment apparatus
AssigneeEbara Corporation
InventorsTakafumi Sekine, Kazutomo Miyazaki
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Abstract
A process gas suction structure for preventing a generation of products from a process gas due to a temperature drop is disclosed. The process gas suction structure includes a double tube structure, and a heating device configured to heat the double tube structure. The double tube structure includes a process-gas flow passage portion where the process gas flows, and a partition portion arranged outside of the process-gas flow passage portion.
Claims8
A process gas suction structure applicable to an exhaust gas treatment apparatus for treating to be made harmless a process gas by contacting it with a liquid, the process gas suction structure comprising:
- a double tube structure;
- and
- a heating device configured to heat the double tube structure,
- wherein the double tube structure comprises:
- a process-gas flow passage portion where the process gas flows;
- and
- a partition portion arranged outside of the process-gas flow passage portion.
A process gas suction structure applicable to an exhaust gas treatment apparatus for treating to be made harmless a process gas by contacting it with a liquid, comprising:
- an annular flow passage structure;
- and
- a heating device configured to heat the annular flow passage structure,
- wherein the annular flow passage structure comprises:
- a process-gas flow passage portion where the process gas flows;
- and
- an annular zigzag flow passage portion arranged outside the process-gas flow passage portion.
Dependencies are inferred from the claim text.