Excimer lamp
AssigneeHamamatsu Photonics K.K.
InventorsHiroki Takeuchi, Tomoki Okura
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AssigneeHamamatsu Photonics K.K.
InventorsHiroki Takeuchi, Tomoki Okura
Estimating the term…
An excimer lamp includes a housing portion having a sealed internal space, an internal electrode, and a discharge gas with which the internal space is filled. One end side of the internal electrode is electrically connected to a power supply member provided with a metal foil electrically connected to the internal electrode and is sealed together with the power supply member to one end side of the housing portion via a sealing portion. The other end side of the internal electrode protrudes into the internal space. A protrusion length, being a length of the internal electrode in the internal space and a length from one end of the internal space to the other end of the internal electrode, is equal to or less than a length from the other end of the internal electrode to the other end of the internal space in a direction along the axis.
An excimer lamp comprising:
Dependencies are inferred from the claim text.