Inspection system for inspection of a lateral surface of a three-dimensional test object
AssigneeMuhlbauer AG
InventorsOliver Habermann, Bertram Burkhardt, Ulf Porth
Life of this patent
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Abstract
An inspection system is provided for the inspection of a lateral surface of a three-dimensional test object. The inspection system includes a conveying structure; (ii) a facet mirror; and (iii) an optical inspection device. In this context, the inspection system is arranged to rotate the conveying structure and the facet mirror in a coordinated manner and in opposite directions of rotation in such a way that each of a plurality of object carriers, as they pass through an inspection area, is imaged onto the inspection device by exactly one of the facets of the facet mirror. A corresponding method for inspection is also provided.
Claims20
An inspection system for inspection of a lateral surface of a three-dimensional test object, wherein the inspection system comprises:
- a conveying structure which is supported so as to be rotatable about a first axis of rotation the conveying structure having a plurality of N object carriers, each of which is configured as a holder for a test object to be inspected, wherein the conveying structure is configured, during a rotation, to sequentially move the object carriers through an inspection area through which passes a path section of a path curve of the object carriers which is defined by the rotation of the conveying structure;
- a facet mirror which is supported so as to be rotatable about a second axis of rotation on a circumference of which facet mirror a number of M facets are provided, each of which is constructed as a mirror element, so that the mirror elements are lined up at least along a circumferential strip along the circumference of the facet mirror;
- and
- an optical inspection device which is aligned with respect to the facet mirror in such a way that the inspection area is optically imaged by the facet mirror onto the inspection device;
- wherein the inspection system is arranged to rotate the conveying structure and the facet mirror in a coordinated manner and in opposite directions of rotation in such a way that each of the object carriers, as they pass through the inspection area, are imaged onto the inspection device by exactly one of the facets.
A method for inspection of a lateral surface of a three-dimensional test object, wherein the method comprises:
- rotating a conveying structure which is supported so as to be rotatable about a first axis of rotation the conveying structure having a plurality of N object carriers, each of which is configured as a holder for a test object to be inspected, such that the object carriers are sequentially moved through an inspection area through which passes a path section of a path curve of the object carriers which is defined by a rotation of the conveying structure;
- rotating a facet mirror which is supported so as to be rotatable about a second axis of rotation, on a circumference of which facet mirror a number of M facets are provided, each of which is constructed as a mirror element, so that the mirror elements are lined up at least along a circumferential strip along the circumference of the facet mirror;
- and
- inspecting, by an optical inspection device, a test object which is located on a corresponding object carrier in the inspection area, which optical inspection device is aligned with respect to the facet mirror in such a way that the inspection area is optically imaged by the latter onto the inspection device;
- wherein the rotating of the conveying structure and the rotating of the facet mirror are carried out in a coordinated manner and in opposite directions of rotation in such a way that each of the object carriers, as they pass through the inspection area, are imaged onto the inspection device by exactly one of the facets.
Dependencies are inferred from the claim text.