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US 11,506,536 B2Granted
Measuring apparatus
AssigneeKioxia Corporation
InventorTaro Shiokawa
Life of this patent
Estimating the term…
Abstract
According to one embodiment, there is provided a measuring apparatus including a measurement section and a control section. The measurement section is configured to acquire a response from a sample. The control section is configured to compare a loading obtained by performing principal component analysis in advance with a first evaluation-use loading obtained by performing principal component analysis onto the response acquired from the sample, and to generate a first reliability index for measurement using principal component analysis, in accordance with a comparison result.
Claims20
A measuring apparatus comprising:
- a measurement section configured to acquire a response from a sample;
- and
- a control section configured to compare a loading obtained by performing principal component analysis in advance with a first evaluation-use loading obtained by performing principal component analysis onto the response acquired from the sample, and to generate a first reliability index for measurement using principal component analysis, in accordance with a comparison result.
Dependencies are inferred from the claim text.