Sensor, detection method, and sensor manufacturing method
AssigneesMitsui Chemicals, Inc., Tohoku University
InventorsTakahito Ono, Masaya Toda, Mai Kurihara
Life of this patent
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Abstract
A sensor includes a body member, a volume change body, and a detection member. The body member has a flat plate-like shape, a first end in a first direction being supported, and a storage space opening at at least one of both end faces in a thickness direction. The volume change body, whose volume changes depending on an amount of a target, is supported by the body member so that at least a part of the volume change body is stored in the storage space. The detection member is in contact with a second end in the first direction of the body member, and detects stress caused by the change in the volume of the volume change body.
Claims20
A sensor comprising:
- a body member that has a flat plate-like shape, a first end in a first direction being supported, and a storage space opening at at least one of end faces in a thickness direction;
- a volume change body, whose volume changes depending on an amount of a target, that is supported by the body member so that at least a part of the volume change body is stored in the storage space;
- and
- a detection member that is in contact with a second end in the first direction of the body member and detects stress caused by the change in the volume of the volume change body.
A detection method including:
- changing a volume of a volume change body depending on an amount of a target, the volume change body being supported by a body member so that at least a part of the volume change body is stored in a storage space, the body member having a flat plate-like shape, a first end in a first direction being supported, and the storage space opening at at least one of end faces in a thickness direction;
- and
- detecting stress caused by the change in the volume of the volume change body in a detection member that is in contact with a second end in the first direction of the body member.
A sensor manufacturing method including:
- forming a storage space in a first member, the first member having a flat plate-like shape and a first end in a first direction being supported, the storage space opening at at least one of end faces in a thickness direction, and providing an element in a second member in contact with a second end in the first direction of the first member, the element detecting stress;
- and
- storing at least a part of the volume change body, whose volume changes depending on an amount of a target, in the storage space so as to be supported by the first member.
Dependencies are inferred from the claim text.