Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium

A method for measuring a three-dimensional profile of an object having a plurality of convex portions and a plurality of concave portions, the method being performed by a profile measuring apparatus,

• the apparatus including:
• a stage configured to receive the object thereon;
• a detector including:
• an irradiator configured to irradiate a linear-shaped measurement light onto an area on a surface of the object in a first direction;
• and
• an imager configured to obtain an image of the irradiated area by detecting a light reflected in a second direction from the irradiated area, the image being formed by the irradiation of the linear-shaped measurement light, and the second direction being different from the first direction, the first direction and the second direction having a non-parallel directional component;
• a relative-movement section configured to create relative rotational movement between the detector and the stage;
• and
• a controller configured to calculate the profile of the object, based on the obtained image,
• the method comprising:
• by using a triangulation method, calculating three-dimensional position coordinates of the irradiated area, based on the obtained image;
• and
• irradiating the linear-shaped measurement light such that a longitudinal direction of a line shape of the linear-shaped measurement light intersects with both (a) a direction of the relative rotational movement that corresponds to a circumferential direction associated with a rotational axis of the relative rotational movement and (b) at least one of a ridge-line direction of a convex portion in the irradiated area and an extending direction of a concave portion in the irradiated area.

A non-transitory computer readable medium storing a program which allows a computer to execute a method for measuring a three-dimensional profile of an object having a plurality of convex portions and a plurality of concave portions, the computer as a profile measuring apparatus including:

• a stage configured to receive the object thereon;
• a detector including:
• an irradiator configured to irradiate a linear-shaped measurement light onto an area on a surface of the object in a first direction;
• and
• an imager configured to obtain an image of the irradiated area by detecting a light reflected in a second direction from the irradiated area, the image being formed by the irradiation of the linear-shaped measurement light, and the second direction being different from the first direction, the first direction and the second direction having a non-parallel directional component;
• a relative-movement section configured to create relative rotational movement between the detector and the stage;
• and
• a controller configured to calculate the profile of the object based on the obtained image, the method comprising:
• by using a triangulation method, calculating three-dimensional position coordinates of the irradiated area, based on the obtained image;
• and
• irradiating the linear-shaped measurement light such that a longitudinal direction of a line shape of the linear-shaped measurement light intersects with both (a) a direction of the relative rotational movement that corresponds to a circumferential direction associated with a rotational axis of the relative rotational movement and (b) at least one of a ridge-line direction of a convex portion in the irradiated area and an extending direction of a concave portion in the irradiated area.

A profile measuring apparatus configured to measure a three-dimensional profile of an object mounted on a stage, the object having a plurality of convex portions and a plurality of concave portions, the apparatus comprising:

• a detector configured to be attached to a relative-movement section, including:
• an irradiator configured to irradiate a linear-shaped measurement light onto an area on a surface of the object in a first direction;
• and
• an imager configured to obtain an image of the irradiated area by detecting a light reflected in a second direction from the irradiated area, the image being formed by the irradiation of the linear-shaped measurement light, and the second direction being different from the first direction, the first direction and the second direction having a non-parallel directional component;
• wherein the relative-movement section is configured to create relative rotational movement between the detector and the stage, and
• wherein the irradiator is configured to irradiate the linear-shaped measurement light such that a longitudinal direction of a line shape of the linear-shaped measurement light intersects with both (a) a direction of the relative rotational movement that corresponds to a circumferential direction associated with a rotational axis of the relative rotational movement and (b) at least one of a ridge-line direction of a convex portion in the irradiated area and an extending direction of a concave portion in the irradiated area.