Process for the generation of metal-containing films

A process for preparing inorganic metal-containing films comprising bringing a solid substrate in contact with a compound of general formula (I) or (II) in the gaseous state

• wherein A is NR2 or OR with R being an alkyl group, an alkenyl group, an aryl group, or a silyl group,
• E is NR or 0,
• n is 1, 2 or 3, and
• R′ is hydrogen, an alkyl group, an alkenyl group, an aryl group, or a silyl group, wherein if n is 2 and E is NR or A is OR, at least one R in NR or OR bears no hydrogen atom in the 1-position,
• wherein a metal-containing compound is deposited from the gaseous state onto the solid substrate before bringing it in contact with a compound of general formula (I) or (II).