Back to results
US 11,501,963 B2Granted
Excimer lamp and light irradiation device
AssigneeUshio Denki Kabushiki Kaisha
InventorHideaki Yagyu
Life of this patent
Estimating the term…
Abstract
An excimer lamp is such that that an interior of a discharge vessel is filled with a first gas including krypton (Kr) or xenon (Xe); a second gas including chlorine (Cl) or bromine (Br); and a third gas which is at least one species selected from among the group consisting of argon (Ar), neon (Ne), and helium (He), and which exhibits a partial pressure Pb that is not less than a partial pressure Plg of the first gas.
Claims4
An excimer lamp, comprising
- a discharge vessel;
- and
- a pair of electrodes arranged on an outer surface of the discharge vessel,
- wherein an interior of the discharge vessel is filled with
- a first gas comprising krypton (Kr);
- a second gas comprising chlorine (Cl) or bromine (Br);
- and
- a third gas which is at least one species selected from among the group consisting of argon (Ar), neon (Ne), and helium (He), a partial pressure Pb of the third gas being not less than a partial pressure Plg of the first gas,
- wherein the excimer lamp satisfies Pb/Plg 10.0,
- wherein where the second gas includes chlorine (Cl), an ultraviolet light having a primary peak wavelength of 222 nm radiates by the excited dimers of KrCl*, and
- wherein where the second gas includes bromine (Br), an ultraviolet light having a primary peak wavelength of 207 nm radiates by the excited dimers of KrBr*.
8 more elements
Dependencies are inferred from the claim text.