Atomic force microscope probes and methods of manufacturing probes

A scanning probe microscopy probe, comprising:

• a chip;
• a mechanical resonator attached to the chip;
• a tip attached to the mechanical resonator;
• and
• a handle attached to the chip;
• a coating covering both the chip and the handle;
• wherein a portion of the handle distal to the chip and electrically connected to the chip is configured to make an electrical connection with an electrical controller;
• wherein the electrical controller is positioned on a scanning probe microscope;
• wherein the electrical connection is a zero insertion force connection;
• wherein at least a portion of the handle comprises a stiffener;
• wherein the stiffener comprises a polyimide;
• wherein the stiffener comprises fiberglass;
• wherein the handle comprises a printed circuit board;
• wherein the coating comprises a polymer;
• wherein the handle and chip together have a thickness of less than or equal to 600 microns;
• wherein the coating comprises polyxylylene, a polyester, polyethylene, polyvinyl chloride, polypropylene, a polyacrylic, a polycellulosic, a polycarbonate, a polystyrene, a polyamide, a polyimide, polyacetonitrile, polymethylamethacrylate, cellulose acetate butyrate, polycarbonate, glycol modified polyethylene terphthalate, polystyrene, styrene butadiene copolymer, a crosslinked novolac epoxy and/or crosslinked Bisphenol;
• wherein the coating comprises silicon oxide, silicon nitride, titanium oxide, aluminum oxide, and/or diamond;
• wherein a leakage current through the coating is less than or equal to 10 nA;
• wherein the probe has a parasitic capacitance of less than or equal to 1 nF.