Device for THz generation and/or detection and methods for manufacturing the same
AssigneeETH Zurich
InventorsYannick Salamin, Ping Ma, Ueli Koch, Jürg Leuthold
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Abstract
A terahertz device includes a first waveguide, which is a plasmonic waveguide, having a first core with a nonlinear material, such as a ferroelectric material, and having a cladding with a first cladding portion including, at a first interface with the first core, a first cladding material that is an electrically conductive material. The terahertz device can include an antenna having a first and a second arm (for receiving or for emitting or for both, receiving and emitting electromagnetic waves in the terahertz range); a first and a second electrode arranged close to the first waveguide.
Claims24
A terahertz device for detecting or for emitting or for both, detecting and emitting electromagnetic waves in the terahertz range, the device comprising a first waveguide which is a plasmonic waveguide comprising
- a first core comprising a nonlinear material;
- and
- a cladding comprising a first cladding portion comprising, at a first interface with the first core, a first cladding material which is an electrically conductive material;
- and
- the device comprising
- an antenna having a first and a second arm, for receiving or for emitting or for both, receiving and emitting electromagnetic waves in the terahertz range;
- a first and a second electrode arranged close to the first waveguide.
A method for manufacturing a terahertz device, the method comprising
- providing a first wafer;
- depositing a nonlinear material on the first wafer;
- providing a second wafer;
- bonding the first wafer to the second wafer, so as to obtain a stacked wafer, thereby burying the nonlinear material;
- and
- providing an antenna having a first arm and a second arm, for receiving or for emitting or for both, receiving and emitting electromagnetic waves in the terahertz range.
A method for manufacturing a terahertz device, the method comprising
- providing a first wafer made of a nonlinear material;
- providing a second wafer;
- bonding the first wafer to the second wafer, so as to obtain a stacked wafer;
- and
- providing an antenna having a first and a second arm, for receiving or for emitting or for both, receiving and emitting electromagnetic waves in the terahertz range.
Dependencies are inferred from the claim text.