Chemical liquid purification method and chemical liquid
AssigneeFUJIFILM Corporation
InventorsTetsuya Kamimura, Masahiro Yoshidome, Yukihisa Kawada
Life of this patent
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Abstract
An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.
Claims21
A chemical liquid purification method comprising:
- obtaining a chemical liquid by purifying a substance to be purified, the substance to be purified containing an organic solvent,
- wherein a content of a stabilizer in the substance to be purified with respect to a total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm, and
- the organic solvent is at least one solvent selected from the group consisting of propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, ethyl lactate, methyl methoxypropionate, cyclopentanone, cyclohexanone, γ-butyrolactone, diisoamyl ether, butyl acetate, isoamyl acetate, isopropanol, 4-methyl-2-pentanol, dimethylsulfoxide, N-methyl-2-pyrrolidone, diethylene glycol, ethylene glycol, dipropylene glycol, propylene glycol, ethylene carbonate, propylene carbonate, sulfolane, cycloheptanone, and 2-heptanone.
A chemical liquid purification method comprising:
- obtaining a chemical liquid by purifying a substance to be purified, the substance to be purified containing an organic solvent,
- wherein a content of a stabilizer in the substance to be purified with respect to a total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm, and
- the stabilizer is at least one compound selected from the group consisting of a compound represented by Formula (1), and a compound represented by Formula (2),
- in Formula (1), m represents an integer of 1 to 4, and n represents an integer of 1 to 6,
- in a case where n is 1, L1 represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, R1 represents a hydrogen atom, R2 represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, and a plurality of R2's may be the same as or different from each other,
- in a case where n is 2 to 6, L1 represents an n-valent linking group, R1 represents a hydrogen atom or a monovalent organic group, although a plurality of R1's may be the same as or different from each other, at least one of R1's represents a hydrogen atom, R2 represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, and a plurality of R2's may be the same as or different from each other, and
- in Formula (2), L3 represents a single bond or a divalent linking group, R3 represents a monovalent organic group, and a plurality of L3's and R3's may be the same as or different from each other respectively.
Dependencies are inferred from the claim text.