Electrode array for a dielectrically impeded plasma treatment
AssigneeCinogy GmbH
InventorsDirk Wandke, Mirko Hahnl, Karl-Otto Storck, Leonhard Trutwig, Melanie Ricke
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AssigneeCinogy GmbH
InventorsDirk Wandke, Mirko Hahnl, Karl-Otto Storck, Leonhard Trutwig, Melanie Ricke
Estimating the term…
The invention relates to an electrode array for a dielectrically impeded plasma treatment of a surface of a body, comprising at least one flexible flat electrode (1) and one dielectric (2) consisting of a flat flexible first material which protects the electrode (1) from the surface to be treated, with a layer (3) impeding a direct current flow. The dielectric (2) can lie on the surface to be treated, above a structure (4) with projections (7), air spaces (5) being formed between the projections (7) for the creation of the plasma, which have a side open towards the surface to be treated, and a bottom-side closure as a result of the layer (3) impeding the direct current flow. The structure (4) comprises a plurality of spacer elements (6) consisting of a second material that has less flexibility than the first material, and the projections (7) of the structure (4) are partially or completely formed by the spacer elements (6).
An electrode arrangement for a dielectric barrier plasma treatment of a surface of a body, comprising:
Dependencies are inferred from the claim text.